Application Note: Baseline® 9100 Residual Solvent Analysis

ETHANOL, ISOPROPANOL, AND ACETONE

During semiconductor fabrication processes, volatile organic compounds (VOCs) are emitted primarily from diffusion and cleaning during wet-etching processes. The Baseline® Series 9100 Gas Chromatograph equipped with a photoionization detector (PID) provides a quick, cost-effective quantitative analysis of IPA and acetone in air at levels in the ppb and sub-ppb range with no preconcentration necessary.

This Application Note will discuss how to achieve faster, more accurate test results of residual solvents using the 9100 analyzer. 

Discover more by downloading the Application Note

Baseline 9100 Gas Chromatograph
Baseline 9100 Gas Chromatograph